X-ray photoelectron spectroscopy


Title: XPS and nano-mechanical properties of hybrid a-C:H and a-C:H:Si films Authors: M. Lubwama, B. Corcoran, J.B. Kirabira, A. Sebbit, K. Sayers, Keywords: a-C:H; a-C:H:Si; X-ray photoelectron spectroscopy; Nano-hardness; Elastic modulus Issue Date: 2011 Abstract: In this study hydrogenated amorphous carbon (a-C:H) and silicon doped hydrogenated amorphous carbon (a-C:H:Si) films were deposited onto Si wafers....
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